Vacuum processing system with holding arrangement

ABSTRACT

The present disclosure provides a holding arrangement. The holding arrangement for holding a substrate includes: a body portion having a first side; a dry adhesive material provided on the first side of the body portion; a seal surrounding the dry adhesive material and configured to provide a vacuum region on the first side, wherein the dry adhesive material is provided in the vacuum region; and a conduit to evacuate the vacuum region.

FIELD

Embodiments of the present disclosure relate to a holding arrangementfor holding a substrate, a carrier for supporting a substrate, a vacuumprocessing system, a method for holding a substrate, and a method forreleasing a substrate. Embodiments of the present disclosureparticularly relate to a holding arrangement for holding a substrateduring substrate processing in a vacuum processing chamber, a carrierfor supporting a substrate in a vacuum processing chamber, a vacuumprocessing system including a vacuum processing chamber, a method forholding a substrate during substrate processing in a vacuum processingchamber, and a method for releasing a substrate after substrateprocessing in a vacuum processing chamber. Specifically, substrateprocessing can include a deposition process, such as a sputterdeposition process.

BACKGROUND

Techniques for layer deposition on a substrate include, for example,thermal evaporation, chemical vapor deposition (CVD) and physical vapordeposition (PVD) such as sputtering deposition. A sputter depositionprocess can be used to deposit a material layer on the substrate, suchas a layer of an insulating material. During the sputter depositionprocess, a target having a target material to be deposited on thesubstrate is bombarded with ions generated in a plasma region todislodge atoms of the target material from a surface of the target. Thedislodged atoms can form the material layer on the substrate. In areactive sputter deposition process, the dislodged atoms can react witha gas in the plasma region, for example, nitrogen or oxygen, to form anoxide, a nitride or an oxinitride of the target material on thesubstrate.

Coated materials can be used in several applications and in severaltechnical fields. For instance, coated materials may be used in thefield of microelectronics, such as for generating semiconductor devices.Also, substrates for displays can be coated using a PVD process. Furtherapplications include insulating panels, organic light emitting diode(OLED) panels, substrates with thin film transistors (TFTs), colorfilters or the like.

The tendency toward larger and also thinner substrates can result inbulging of the substrates due to stress applied to the substrate, e.g.,during a deposition process. Support systems which hold a substrateduring a deposition process introduce bulging on the substrate, e.g.,due to forces that push the substrate edge towards the center of thesubstrate. Bulging can, in turn, cause problems due to the increasinglikelihood of breakage. Accordingly, there is a need to reduce bulgingand to support bigger and thinner substrates without damage or breakage.

In view of the above, new holding arrangements for holding a substrateduring substrate processing in a vacuum processing chamber, carriers forsupporting a substrate in a vacuum processing chamber, vacuum processingsystems, methods for holding a substrate, and methods for releasing asubstrate, that overcome at least some of the problems in the art, arebeneficial.

SUMMARY

In light of the above, a holding arrangement for holding a substrate, acarrier for supporting a substrate, a vacuum processing system, a methodfor holding a substrate, and a method for releasing a substrate areprovided. Further aspects, benefits, and features of the presentdisclosure are apparent from the claims, the description, and theaccompanying drawings.

According to an aspect of the present disclosure, a holding arrangementfor holding a substrate, specifically during substrate processing in avacuum processing chamber, is provided. The holding arrangement includesa body portion having a first side; a dry adhesive material provided onthe first side of the body portion; a seal surrounding the adhesive andconfigured to provide a vacuum region on the first side, wherein the dryadhesive material is provided in the vacuum region; and a conduit toevacuate the vacuum region.

According to a further aspect of the present disclosure, a holdingarrangement for holding a substrate during substrate processing in avacuum processing chamber is provided. The holding arrangement includesa body portion having a first side; a dry adhesive material provided onthe first side of the body portion and comprising a plurality offilaments; a seal surrounding the adhesive and configured to provide avacuum region on the first side, wherein the dry adhesive material isprovided in the vacuum region; and a conduit to evacuate the vacuumregion, wherein the conduit is configured to apply first negativepressure to the vacuum region to attach the substrate, and wherein theconduit is configured to apply a second negative pressure to the vacuumregion to move the substrate closer to the body portion to buckle theplurality of filaments, releasing the substrate.

According to another aspect of the present disclosure, a carrier forsupporting a substrate, specifically in a vacuum processing chamber, isprovided. The carrier includes a carrier body, and one or more holdingarrangements, wherein the one or more holding arrangements are mountedon the carrier body. The holding arrangement includes a body portionhaving a first side; a dry adhesive material provided on the first sideof the body portion; a seal surrounding the adhesive and configured toprovide a vacuum region on the first side, wherein the dry adhesivematerial is provided in the vacuum region; and a conduit to evacuate thevacuum region.

According to a further aspect of the present disclosure, a vacuumprocessing system is provided. The vacuum processing system includes acarrier. The carrier includes a carrier body, and one or more holdingarrangements, wherein the one or more holding arrangements are mountedon the carrier body. The holding arrangement includes a body portionhaving a first side; a dry adhesive material provided on the first sideof the body portion; a seal surrounding the adhesive and configured toprovide a vacuum region on the first side, wherein the dry adhesivematerial is provided in the vacuum region; and a conduit to evacuate thevacuum region.

According to an aspect of the present disclosure, a method for holding asubstrate with at least one holding arrangement including a dry adhesivematerial is provided. The method includes applying a first negativepressure to a vacuum region of the at least one holding arrangement forattaching a substrate to the at least one holding arrangement; movingthe substrate through a vacuum processing chamber; and applying a secondnegative pressure to a vacuum region of the at least one holdingarrangement for releasing the substrate from the at least one holdingarrangement.

According to another aspect of the present disclosure, a method forreleasing a substrate from at least one holding arrangement is provided.The method includes increasing the vacuum level in a vacuum region ofthe at least one holding arrangement to increase the force, with whichthe substrate is pressed onto a dry adhesive material, for releasing thesubstrate. Specifically, increasing the vacuum level in the vacuumregion can be understood as reducing the pressure in the vacuum region.

Embodiments are also directed at apparatuses for carrying out thedisclosed methods and include apparatus parts for performing eachdescribed method aspect. These method aspects may be performed by way ofhardware components, a computer programmed by appropriate software, byany combination of the two or in any other manner. Furthermore,embodiments according to the disclosure are also directed at methods foroperating the described apparatus. The methods for operating thedescribed apparatus include method aspects for carrying out everyfunction of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments. The accompanying drawings relate to embodiments of thedisclosure and are described in the following:

FIG. 1 shows a schematic top view of a holding arrangement for holding asubstrate according to embodiments described herein;

FIG. 2 shows a schematic cross-sectional view of a holding arrangementfor holding a substrate according to embodiments described herein;

FIG. 3A shows a schematic view of a holding arrangement for holding asubstrate according to embodiments described herein;

FIG. 3B shows a schematic view of a holding arrangement for holding asubstrate according to embodiments described herein;

FIG. 4 shows a schematic top view of a carrier for supporting asubstrate according to embodiments described herein;

FIG. 5 shows a schematic cross-sectional view of a carrier forsupporting a substrate according to embodiments described herein;

FIG. 6 shows a schematic top view of a carrier for supporting asubstrate according to embodiments described herein;

FIG. 7 shows a schematic side view of a carrier for supporting asubstrate according to embodiments described herein;

FIG. 8 shows a schematic view of a vacuum processing system according toembodiments described herein;

FIG. 9 shows a flow chart of a method for holding a substrate accordingto embodiments described herein;

FIG. 10 shows a flow chart of a method for releasing a substrateaccording to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

Reference will now be made in detail to the various embodiments of thedisclosure, one or more examples of which are illustrated in thefigures. Within the following description of the drawings, the samereference numbers refer to same components. Generally, only thedifferences with respect to individual embodiments are described. Eachexample is provided by way of explanation of the disclosure and is notmeant as a limitation of the disclosure. Further, features illustratedor described as part of one embodiment can be used on or in conjunctionwith other embodiments to yield yet a further embodiment. It is intendedthat the description includes such modifications and variations.

The tendency to larger and also thinner substrates can result in bulgingof the substrates due to stress applied to the substrate, e.g., during adeposition process. Support systems such as clamps which hold asubstrate during a deposition process introduce bulging on thesubstrate, e.g., due to forces that push the substrate edge towards thecenter of the substrate. Bulging can, in turn, cause problems due to theincreased likelihood of breakage.

Further, clamps usually encompass a substrate, i.e. contact thesubstrate on two opposite surfaces of the substrate. For instance duringa deposition process, a layer is deposited on one of these two surfaces.As the clamp covers a part of the substrate, a layer is not deposited onthat part of the substrate. Furthermore, clamps can damage the substratesurface by mechanical contact. For instance, particles can be generatedby the mechanical contact. Even in the case when no clamp is used duringthe deposition process, a mechanical contact of the deposited layerafter the deposition process can damage the substrate. Hence, it can bebeneficial to avoid mechanically contacting one surface of thesubstrate, specifically the surface of the substrate that is to beprocessed, particularly in a deposition process. When practicing someembodiments described herein, particles generated can be reduced.

The present disclosure can use a first negative pressure or first vacuumlevel to generate a first suction force to pull a substrate towards adry adhesive material. Once contact has been made between the substrateand the dry adhesive material, the substrate can be held on the dryadhesive material by the adhesive force of the dry adhesive material.Specifically, the first negative pressure can be turned off when thecontact between the substrate and the dry adhesive material has beenestablished. For releasing the substrate, a second negative pressure orsecond vacuum level can be used to generate a second suction force topull the substrate towards a dry adhesive material. The second suctionforce can be higher than the first suction force. Specifically, thesubstrate can be pressed closer onto the dry adhesive material which canlead to buckling of the dry adhesive material. The adhesive force of thedry adhesive material can be lower when the dry adhesive material isbuckled and the substrate can be released. The substrate can be releasedfrom the dry adhesive material with reduced mechanical stress. Damage orbreakage of the substrate can be prevented. Further, the dry adhesivematerial can reduce or even avoid a bulging when holding the substrate,e.g., a bulging due to forces that may push the substrate edge towardsthe center of the substrate. Furthermore, by pulling the substratetowards the dry adhesive material by a suction force, contacting of asurface of the substrate opposite to the dry adhesive material can beavoided. In particular, embodiments of the present disclosure can holdbigger and thinner substrates without damage or breakage.

The embodiments described herein can be utilized for evaporation onlarge area substrates, e.g., for display manufacturing. Specifically,the substrates or carriers, for which the structures and methodsaccording to embodiments described herein are provided, are large areasubstrates. For instance, a large area substrate or carrier can be GEN4.5, which corresponds to about 0.67 m² substrates (0.73×0.92 m), GEN 5,which corresponds to about 1.4 m² substrates (1.1 m×1.3 m), GEN 7.5,which corresponds to about 4.29 m² substrates (1.95 m×2.2 m), GEN 8.5,which corresponds to about 5.7 m² substrates (2.2 m×2.5 m), or even GEN10, which corresponds to about 8.7 m² substrates (2.85 m×3.05 m). Evenlarger generations such as GEN 11 and GEN 12 and corresponding substrateareas can similarly be implemented.

The term “substrate” as used herein shall embrace inflexible substrates,e.g., plates, and flexible substrates such as a web or a foil. As anexample, the substrate can have a thickness of less than 1 mm,specifically less than 0.7 mm, and more specifically less than 50 μm. Asan example, the substrate can have a thickness in a range of 0.3 mm to0.7 mm. According to some embodiments, the substrate can be made fromany material suitable for material deposition. For instance, thesubstrate can be made from a material selected from the group consistingof glass (for instance soda-lime glass, borosilicate glass etc.), metal,polymer, ceramic, compound materials, carbon fiber materials, mica orany other material or combination of materials which can be coated by adeposition process.

FIG. 1 shows a schematic view of a holding arrangement 100 for holding asubstrate, specifically during substrate processing in a vacuumprocessing chamber, according to embodiments described herein.

The holding arrangement 100 can include a body portion 110 having afirst side 112. A dry adhesive material 120 can be provided on the firstside 112 of the body portion 110. A seal 130 can surround the dryadhesive material 120 and can be configured to provide a vacuum regionon the first side 112. The dry adhesive material 120 can be provided inthe vacuum region. Further, a conduit 140 (see FIG. 2) can be providedto evacuate the vacuum region.

Specifically, the conduit 140 can have an opening 142. The opening 142can be arranged in the vacuum region. For instance, the opening 142 canbe arranged in the center of the vacuum region. Further, more than oneopening 142 can be provided. For instance, the more than one openingscan be distributed randomly or regularly over the vacuum region.According to some embodiments described herein, the conduit 140 can beconfigured to be connected to a suction port for applying a negativepressure to the vacuum region. The conduit 140 can be configured topenetrate the body portion 110. Specifically, the conduit 140 can beconfigured to provide a fluid communication between vacuum regionprovided on the first side 112 and another side of the body portion 110,such as a side of the body portion 110 opposite the first side 112 (see,e.g., FIG. 2) or transfers to the first side 112.

Typically, “pressure” can be defined as force per unit area, and can beusually understood as the force exerted by a fluid, such as air or wateron a uniform surface. As such, it is positive. Accordingly, the valuesfor the “negative pressures” used herein can be referred to zero bar.However, the term “negative pressure” as used in the context of thepresent disclosure can refer to a situation in which an enclosed volume,such as the vacuum region, has lower pressure than the surroundings. Anycompromise in the divide between this area and the more highlypressurized area around the vacuum region can cause substances to flowinwards. Accordingly, objects located in the more highly pressurizedarea around the vacuum region can be pulled into the vacuum region by asuction force that can be generated by the negative pressure. In thecontext of the present disclosure, when referring to a value of the“suction force”, the value of the “suction force” acting on an object,such as the substrate 10, can be meant. Specifically, when comparing twoor more “suction forces” by their value, the comparison can beunderstood as relating to the force acting on an object, such as thesubstrate 10, to move, specifically to pull, the substrate in adirection. In this context, phrases like “a second suction force beinglarger than a first suction force” can be understood in that the secondsuction force can employ a stronger pulling force on an object, such asthe substrate 10, than the first suction force. In the context of avacuum region having a certain level of vacuum, the “suction force”generated by the negative pressure can also be understood as the pushingforce of the surrounding pushing an object towards the vacuum region.That is, although the term “suction force” is used throughout thepresent application, the person skilled in the art will understand thata pushing force exerted by the surrounding on an object can be meant.Accordingly, a “negative pressure” can be referred to as “a pressure ina vacuum region, which is below the pressure in the surrounding region”,e.g. “a pressure in a vacuum region, which is smaller than atmosphericpressure”.

Further, the term “vacuum level” can be understood as a level of vacuumgenerated by a negative pressure. In this context, a smaller negativepressure can lead to a higher “vacuum level”, and vice versa. That is,relations like “a second negative pressure being smaller than a firstnegative pressure” can be understood as having a corresponding secondvacuum level being higher than a corresponding first vacuum level.Specifically, the pressure in the vacuum region can be lower when ahigher vacuum level is applied.

FIG. 2 shows a schematic cross-sectional view of a holding arrangement100 according to embodiments described herein facing a substrate 10.

As shown in FIG. 2, the holding arrangement 100 can be provided facing asubstrate 10. Specifically, the holding arrangement 100 can be providedin a manner that the first side 112 of the body portion 110 faces thesubstrate 10. Specifically, the holding arrangement 100 can be arrangedwith the dry adhesive material 120 facing the substrate 10.

According to some embodiments described herein, the dry adhesivematerial 120 can be a gecko adhesive, such as a gecko tape or geckoelement. In the context of the present disclosure, “gecko adhesive” canbe understood as an adhesive that mimics the ability of geckos' feet toadhere to surfaces, such as for example vertical surfaces. Specifically,the dry adhesive material 120 can be configured to adhere to thesubstrate 10 due to van der Waals forces between the dry adhesivematerial 120 and a surface of the substrate 10. However, the presentdisclosure is not limited thereto, and other adhesives suitable forholding the substrate 10 can be used.

According to some embodiments described herein, the dry adhesivematerial 120 can be a synthetic setae material. The adhesivecapabilities of the dry adhesive material 120, specifically of thesynthetic setae material, can be related to the adhesive properties of agecko foot. The natural adhesive capability of the gecko foot allows theanimal to adhere to many types of surfaces under most conditions. Theadhesive capability of the gecko foot is provided by numerous hair-typeextensions, called setae, on the feet of the gecko. It is noted herethat the term “synthetic setae material” can be understood as asynthetic material which emulates the natural adhesive capability of thegecko foot and which includes similar adhesive capabilities to the geckofoot. Moreover, the term “synthetic setae material” can be synonymouslyused with the term “synthetic gecko setae material” or with the term“gecko tape material”. However, the present disclosure is not limitedthereto and other dry adhesive materials suitable for holding thesubstrate 10 can be used.

The dry adhesive material 120, for example the synthetic setae material,can be inorganic. According to some embodiments described herein, thedry adhesive material 120 can be substantially 100% inorganic. Moreover,the microstructure of the dry adhesive material 120 can includenanotubes. According to some embodiments described herein, themicrostructure of the dry adhesive material 120 includes carbonnanotubes.

As illustrated in FIG. 2, the dry adhesive material can include aplurality of filaments 122 (for illustration purpose only one filamentis marked by reference sign 122 in FIG. 2). For instance, the filaments122 can be nanotubes or carbon nanotubes. Each of the pluralityfilaments 122 can be a substantially longitudinal member. Specifically,each of the plurality filaments 122 can have one dimension that islarger or substantially larger than the remaining two dimensions. Forthe sake of reference, the longest dimension of the filaments 122 can bethe length of the filament. That is, the filaments can be elongatedalong a length direction.

Each filament 122 can be attached with one end to the first side 112 ofthe body portion 110. Specifically, each filament 122 can be attachedwith one end along the length direction to the first side 112 of thebody portion 110. Each filament 122 can extend from the first side 112of the body portion 110. Specifically, each filament 122 can extend fromthe first side 112 of the body portion 110 along the length direction.That is, each filament 122 can have second side that is free of anattachment to the body portion 110, specifically to the first side 112of the body portion. The second side of each filament 122 can extendaway from the body portion 110, specifically to the first side 112 ofthe body portion 110. The second side of each filament 122 can beopposite the first side of the respective filament 122, specificallyalong the length direction.

According to some embodiments disclosed herein, the second side of eachfilament 122 can be configured to be attachable to the substrate 10.Specifically, the second side of each filament 122 can be configured toadhere to the substrate 10 by van der Waals forces as outlined herein.

As further shown in FIG. 2, the seal 130 can be arranged along acircumference of the body portion 110, specifically of the first side112 of the body portion. The seal 130 can be attached to the bodyportion 110 with a first side. A second side of the seal 130 can extendaway from the body portion 110, specifically along the length directionof the filaments 122. According to some embodiments described herein,the seal 130 can have a height that corresponds to or substantiallycorresponds to the length of the filaments 122.

Although the seal 130 is shown in FIGS. 1 and 2 so as to surround thedry adhesive material 120, dry adhesive material 120 can also beprovided in an area that is not surrounded by the seal 130. Forinstance, a first portion of the dry adhesive material 120 can bearranged within an area delimited by the seal 130 and a second portionof the dry adhesive material 120 can be arranged outside the areadelimited by the seal 130. Specifically, the seal 130 can delimit thevacuum region. According to some embodiments described herein, the seal130 can seal the vacuum region from a surrounding environment,specifically when the seal is in contact with the substrate 10.

According to embodiments described herein, the seal 130 can include thesame material as the dry adhesive material 120. Further, the seal 130can be made of different material as the dry adhesive material 120. Forinstance, the seal 130 can include and/or be made of material such assilicone, PEEK (polyether ether ketone), and/or any other suitablematerial.

FIG. 3A shows a schematic view of a holding arrangement 100 for holdinga substrate 10 according to embodiments described herein, wherein thesubstrate 10 is attached to the holding arrangement 100.

Specifically, the substrate 10 and/or the holding arrangement 100 can beconfigured to be movable relative to each other. Specifically, thesubstrate and/or the holding arrangement 100 can be brought into closeproximity to each other. According to embodiments described herein, thedry adhesive material 120 can be configured to attach the substrate 10to the body portion 110 under appliance of a first negative pressure p1to the vacuum region. By applying the first negative pressure p1 to thevacuum region, a first vacuum level can be generated in the vacuumregion. Specifically, the first negative pressure p1 can be equal to orsmaller than 1 bar.

According to embodiments described herein, the first negative pressurep1 can generate a first suction force F1. The first suction force F1 canpull the substrate 10 towards the holding arrangement 100. Specifically,the first suction force F1 can pull the substrate 10 towards the holdingarrangement 100 to bring the substrate 10 into contact with the dryadhesive material 120. When the substrate 10 contacts the dry adhesivematerial 120, the substrate 10 can be attached to the holdingarrangement 100 by the adhesive force of the dry adhesive material 120.That is, the first negative pressure p1 can be used to generate thefirst suction force F1 for pulling the substrate 10 and/or the holdingarrangement 100 in the direction of the other one of the substrate 10and the holding arrangement 100 so that the dry adhesive material 120can attach the substrate.

According to embodiments described herein, the first negative pressurep1 and/or the first suction force F1 can be turned off when and/or oncethe attachment of the substrate 10 and the holding arrangement 100 hasbeen established. According to embodiments described herein, theadhesive force provided by the dry adhesive material 120 can besufficient for holding the substrate 10. Specifically, the adhesiveforce provided by the dry adhesive material 120 can be, for instance,about 5 N/cm², e.g. for horizontally holding a polymer material. Havingthe substrate 10 attached to the holding arrangement 100 substantially,the processing of the substrate 10 can be performed. For instance, thesubstrate 10 can be moved through vacuum processing chamber.

As outlined herein, the seal 130 can be configured to provide the vacuumregion on the first side 112 of the body portion 110. Specifically, theseal 130 can delimit the region that is evacuated by the first negativepressure p1, i.e. the vacuum region. Further, the size of the vacuumregion and/or the size of the negative pressure applied to the vacuumregion can be adapted and/or set to predetermined values to generate asuction force. Specifically, the larger the vacuum region gets, thehigher the negative pressure has to be for generating the same suctionforce, and vice versa.

According to embodiments described herein, the attachment of thesubstrate 10 and the holding arrangement 100 as outlined herein can beperformed under non-vacuum conditions. “Non-vacuum conditions” as usedherein can be understood as any environmental conditions that have acertain pressure distinct from the vacuum level. For instance,“non-vacuum conditions” can be understood as atmospheric conditions,such as atmospheric pressure, or substantially atmospheric conditions,such as substantially atmospheric pressure. Further, “non-vacuumconditions” can be understood to distinguish from “vacuum conditions”,meaning that under “non-vacuum conditions” there is higher pressure thanunder “vacuum conditions”.

FIG. 3B shows a schematic view of a holding arrangement 100 for holdinga substrate 10 according to embodiments described herein, wherein thesubstrate 10 is released from the holding arrangement 100.

Having the substrate 10 attached to the holding arrangement 100 by theadhesive force of the dry adhesive material 120, the substrate 10 can bereleased from holding arrangement 100, specifically after processing ofthe substrate 10. For instance, a moving member can be provided forpushing the substrate 10 away from holding arrangement 100. However,such a moving member involves additional elements and costs. Further, bypushing the substrate away from the holding arrangement 100 by such amoving member, mechanical stress can be induced in the substrate 10.

According to embodiments described herein, the dry adhesive material 120can be configured to release the substrate 10 from the body portion 110under appliance of a second negative pressure p2 to the vacuum region.By applying the second negative pressure p2 to the vacuum region, asecond vacuum level can be generated in the vacuum region. Specifically,the force with which the substrate is pressed onto the dry adhesivematerial 120, can be increased. That is, by adding second suction forceF2, which can be generated by the second negative pressure p2, to theadhesive force of the dry adhesive material 120, the substrate 10 can bereleased from the holding arrangement 100. The substrate 10 can bereleased from the holding arrangement 100, specifically the dry adhesivematerial 120, with reduced mechanical stress. When practicing someembodiments describe herein, damage or breakage of the substrate can beprevented. Further, no additional parts are needed for releasing thesubstrate from the holding arrangement. Specifically, the secondnegative pressure p2 can be equal to or smaller than the first negativepressure p1, and/or equal to or larger than zero bar.

According to embodiments described herein, the second negative pressurep2 can be applied to increase the force with which the substrate 10 ispressed onto the dry adhesive material 120. According to embodimentsdescribed herein, the second negative pressure p2 can be smaller thanthe first negative pressure p1, i.e. the value of the first secondnegative pressure p2 can be closer to zero than the value of the firstnegative pressure p1. In particular, the relation 1 bar>p1>p2>0 bar canhold true. Specifically, the second suction force F2 can be larger thanthe first suction force F1. The substrate 10 can be moved, specificallyby the second negative pressure p2, towards the holding arrangement 100,specifically towards the body portion 110. For instance, the substrate10 can be pulled towards the body portion 110 by the second suctionforce F2, which can be generated by the second negative pressure p2.

According to embodiments described herein, the dry adhesive material 120can be configured to release the substrate 10 from the body portion 110by moving the substrate in the direction of the body portion 110.Specifically, the dry adhesive material 120 can be configured to releasethe substrate 10 from the body portion 110 by moving the substrate 10towards the body portion 110. As shown in FIG. 3B, by moving thesubstrate 10 towards the body portion 110, i.e. closer to the bodyportion 110, a conformational change can be induced in the dry adhesivematerial 120. Specifically, the dry adhesive material 120 can be forcedto alter a geometric configuration of the dry adhesive material 120. Forinstance, the filaments 122 of the dry adhesive material 120 can bebuckled. By altering the geometric configuration of the dry adhesivematerial 120, specifically by buckling the filaments 122 of the dryadhesive material 120, the adhesive force of the dry adhesive material120 can be altered. For instance, the adhesive force of the dry adhesivematerial 120 acting on the substrate can be altered. Specifically, theadhesive force of the dry adhesive material 120 acting on the substratecan be lowered.

In the context of the present disclosure, the term “conformationalchange” can be understood as a change in the shape of a macromolecule.For instance, the term “conformational change” can be understood as achange in the shape of the filaments of the dry adhesive material 120.

When moving the substrate 10 closer to the body portion, the seal 130can be compressed. According to embodiments described herein, the seal130 can be flexible. When practicing embodiments described herein, theseal 130 can be crimped under appliance of the second negative pressure,i.e. by the second suction force F2, generating an elastic force of theseal 130. The elastic force of the seal 130 can act in an oppositedirection to the second suction force F2. That is, the second suctionforce F2 can be large enough to overcome the elastic force of the seal130. Further, when practicing embodiments described herein, the elasticforce of the seal 130 can provide a tolerance range for the firstsuction force F1. Specifically, the elastic force of the seal 130 canwork against the first suction force F1 when attaching the substrate 10to the holding arrangement 100 so that the substrate 10 is not moved tooclose to the body portion 110. When practicing embodiments describedherein, inducing a conformational change of the dry adhesive material120 during attachment of the substrate can be prevented.

According to embodiments described herein, the release of the substrate10 from the holding arrangement 100 as outlined herein can be performedunder non-vacuum conditions. Further, having the substrate 10 attachedto the holding arrangement 100, the seal 130 can provide a sufficientisolation from the environment so that a sufficient suction force can begenerated in the vacuum region, enabling release of substrate 10 fromthe holding arrangement 100 under vacuum conditions.

FIGS. 4 and 5 show a schematic top detail view and a schematiccross-sectional detail view, respectively, of a carrier 200 forsupporting a substrate 10 according to embodiments described herein.FIGS. 6 and 7 show a schematic top view and a schematic side view,respectively, of a carrier 200 for supporting a substrate 10 accordingto embodiments described herein. Specifically, FIGS. 4 and 5 showschematic detail views of the part of the carrier 200 indicated by adashed circle in FIG. 6.

The carrier 200 can include a carrier body 210 and one or more holdingarrangements. Specifically, the one or more holding arrangements can bethe holding arrangements 100 as described herein. The one or moreholding arrangements 100 can be mounted on the carrier body 210. Forinstance, each of the one or more holding arrangements 100 can beconnected to, specifically mounted to, a support structure 220. Thesupport structure 220 can be connected to, specifically mounted to, thecarrier body 210. The one or more holding arrangements 100 can beconfigured for holding the substrate 10 at the carrier body 210.Specifically, the one or more holding arrangements 100 can use a holdingforce to hold the substrate 10. The holding force can be substantiallyparallel to a surface of the substrate 10, specifically when thesubstrate 10 is in a substantially vertical orientation. The holdingforce can be provided by the dry adhesive material 120 of the holdingarrangement 100.

The carrier 200 can be configured to support the substrate 10 duringsubstrate processing, for example, during a layer deposition process,such as a sputtering process. The carrier body 210 can include, or be, aplate or a frame configured for contacting and/or supporting thesubstrate 10, for example, using a surface provided by the plate orframe. The carrier body 210 can include and/or be made of aluminum,aluminum alloys, titanium, alloys thereof, stainless steel or the like.According to some embodiments, which can be combined with otherembodiments described herein, the carrier body 210 can include two ormore elements such as a top bar, sidebars and a bottom bar. The two ormore elements can define an aperture opening 215. In someimplementations, a masking device can be provided at the carrier 200 tomask one or more portions of the substrate 10. As an example, themasking device can be an edge exclusion mask.

The substrate 10 can have a first surface and a second surface. Thefirst surface and the second surface can be opposite surfaces of thesubstrate. The first surface can be a backside surface of the substrate10. As an example, the first surface can be configured to face towardsthe one or more holding arrangements 100. The second surface can be afront surface of the substrate 10. The second surface can be a surfaceof the substrate 10 to be processed in a vacuum processing chamber. Asan example, the second surface can be configured for layer depositionthereon. According to some embodiments, which can be combined with otherembodiments described herein, the dry adhesive material 120 can beconfigured to contact the first surface of the substrate 10. Whenpracticing some embodiments described herein, a contact with the secondsurface, e.g., a deposition surface of the substrate 10, can be reducedor avoided. A uniformity of a layer during a deposition process can beimproved.

According to some embodiments described herein, the carrier 200 can beconfigured for holding or supporting the substrate 10 in a substantiallyvertical orientation, e.g., during a layer deposition process. As anexample, the one or more holding arrangements 100 can be configured tohold the substrate 10 in the substantially vertical orientation. As usedthroughout the present disclosure, “substantially vertical” can beunderstood particularly when referring to the substrate orientation, toallow for a deviation from the vertical direction or orientation of ±20°or below, e.g. of ±10° or below. This deviation can be provided forexample because a substrate support with some deviation from thevertical orientation might result in a more stable substrate position.Yet, the substrate orientation, e.g., during the layer depositionprocess, can be considered substantially vertical, which can beconsidered different from the horizontal substrate orientation.

The substrate 10 can have an upper side 11, a lower side 12 and twolateral sides 13 (e.g., a left side and a right side). The upper side11, the lower side 12 and the two lateral sides 13 can be defined withrespect to a vertical orientation of the substrate 10. Likewise, thecarrier 200 or carrier body 210 can have an upper side, a lower side andtwo lateral sides (e.g., a left side and a right side).

In some implementations, the one or more holding arrangements 100 can bemounted on the carrier body 210 to hold at least one of the upper side11, the lower side 12, and at least one of the two lateral sides 13 ofthe substrate 10. For instance, one or more holding arrangements 100(e.g., two holding arrangements) can be provided to hold the upper side11 and/or one or more holding arrangements 100 (e.g., two holdingarrangements) can be provided to hold the lower side 12 and/or two ormore holding arrangements 100 can be provided to hold each side of thetwo lateral sides 13 (e.g., two holding arrangements for the left sideand two holding arrangements for the right side).

According to some embodiments described herein, the one or more holdingarrangements 100 can be mounted on the carrier body 210 to hold thesubstrate 10 suspended. Specifically, the one or more holdingarrangements 100 can be configured to hold the upper side 11 of thesubstrate 10. In some implementations, the substrate 10 is only held atthe upper side 11. For instance, the carrier 200 can include one or moreholding arrangements 100 (e.g., two holding arrangements) only at theupper side of the carrier body 210 to hold the upper side 11 of thesubstrate 10.

According to some embodiments described herein, the holding arrangement100 can be configured to contact the substrate 10 only on one surface ofthe substrate 10. For instance, the holding arrangement 100 can beconfigured to contact the substrate 10 on the backside of the substrate,i.e. that surface of the substrate 10 that is not processed. Further,the support structure 220 can be provided, specifically mounted, betweeneach of the one or more holding arrangements 100 and the carrier body210. As shown in FIG. 7, the aperture opening 215 can correspond to orbe larger, specifically slightly larger, than a surface area of thesubstrate 10. When practicing some embodiments described herein, thewhole front side of the substrate can be processed. Specifically, someembodiments described herein can be practiced without devices providingedge exclusion.

FIG. 8 shows a schematic view of a deposition system 300 according toembodiments described herein.

The deposition system 300 can include a processing chamber 312,specifically a vacuum processing chamber 312, such as a depositionchamber adapted for a deposition process. The deposition process can bea PVD or CVD process. A carrier 200 can have the substrate 10 positionedthereon. The carrier 200 can be configured according to the embodimentsdescribed herein and can have one or more holding arrangements 100. Thecarrier 200 can be located within or at a support on a substratetransportation device 340.

A deposition material source 330 can be provided in the processingchamber 312 facing the side of the substrate 10 to be processed, e.g.coated. The deposition material source 330 can provide depositionmaterial 335 to be deposited on the substrate 10. The depositionmaterial source 330 can be a target with deposition material thereon orany other arrangement allowing material to be released for deposition onthe substrate 10. In some implementations, the deposition materialsource 330 can be a rotatable target. According to some embodimentsdescribed herein, the deposition material source 330 can be movable inorder to position and/or replace the deposition material source 330.According to other embodiments described herein, the deposition materialsource 330 can be a planar target.

According to some embodiments described herein, the deposition material335 can be chosen according to the deposition process and the laterapplication of the coated substrate. For instance, the depositionmaterial 335 of the deposition material source 330 can be a materialselected from the group consisting of: a metal, such as aluminum,molybdenum, titanium, copper, or the like, silicon, indium tin oxide,and other transparent conductive oxides. Oxide-, nitride- orcarbide-layers, which can include such materials, can be deposited byproviding the material from the deposition material source 330 or byreactive deposition, i.e. the material from the deposition materialsource 330 can react with elements like oxygen, nitride, or carbon froma processing gas.

A carrier 200 according to some embodiments described herein can bebeneficial for stationary processes and also for non-stationaryprocesses. The carrier 200 can hold the substrate 10 in a substantiallyvertical orientation.

According to embodiments described herein, the deposition system 300 canbe implemented in a vacuum processing system. The vacuum processingsystem can include a swing module. Before attaching the substrate 10 toa holding arrangement 100, a carrier can lie on the swing module. Avacuum connection can be provided from the swing module to the carrier.Specifically, a vacuum connection can be provided from the swing moduleto the holding arrangement. For instance, a vacuum connection can beprovided from the swing module to the suction port of the holdingarrangement.

A pin array can be provided on which the substrate 10 can lie on. Thesubstrate 10 can be lowered, specifically by the pin array, onto theholding arrangement 100. When the substrate 10 is lowered onto theholding arrangement 100, a first vacuum level can be applied to theholding arrangement 100, specifically to the vacuum region of theholding arrangement 100. The first vacuum level can be applied, e.g., bythe first negative pressure p1. The value of first vacuum level and/orthe first negative pressure can be calculated in advance and can beproportional to the force for engaging the holding arrangement 100 withthe substrate surface. When an engagement between the holdingarrangement 100 and the substrate 10 has been established, the firstvacuum level and/or the first negative pressure can be switched off.

Having a stable connection between the holding arrangement 100 and thesubstrate 10 established, the carrier 200 can be tilted in a verticaldirection. The carrier can be inserted into the deposition system 300for substrate processing, such as layer deposition.

After processing the substrate, the carrier 200 can be moved out of thedeposition system 300. The carrier 200 can be tilted back from thevertical direction to the horizontal direction and moved back to theswing module. When the carrier is moved to the swing module, the vacuumconnection from the swing module to the holding arrangement can beestablished again. For releasing the substrate 10 from the holdingarrangement 100, the substrate 10 can be pressed closer to the holdingarrangement 100. By moving the substrate 10 closer to the holdingarrangement 100, buckling of the dry adhesive material 120 can beinduced. The adhesive force of the dry adhesive material 120, with whichthe substrate 10 is attached to the holding arrangement can be reduced,disengaging the holding arrangement 100 from the substrate 10. Forinstance, the higher force for pressing the substrate closer to theholding arrangement can be generated by a second vacuum level and/orsecond negative pressure p2. When the substrate 10 has been releasedfrom the holding arrangement 100, the substrate 10 can be lifted by thepin array. Further, a robot hand can be provided for exchanging theprocessed substrate with a substrate to be processed.

FIG. 9 shows a flow chart of a method 400 for holding a substrateaccording to embodiments described herein. The method 400 can utilizeholding arrangements 100 and carriers 200 according to some embodimentsdescribed herein. Likewise, holding arrangements 100 and carriers 200can be configured to implement the method 400 according to theembodiments described herein. Specifically, the method 400 can implementat least one holding arrangement 100 including a dry adhesive material120.

The method 400 can include, in block 410, applying a first negativepressure p1 to a vacuum region of the at least one holding arrangement100 for attaching a substrate 10 to the at least one holding arrangement100. The first negative pressure p1 can generate a first suction forceF1 for pulling the substrate 10 in the direction of the at least oneholding arrangement.

Further, the method 400 can include, in block 420, moving the substratethrough a processing chamber. Specifically, the processing chamber 312can be a vacuum processing chamber 312 as outlined herein, such as adeposition chamber adapted for a deposition process.

Furthermore, the method 400 can include, in block 430, applying a secondnegative pressure p2 to the vacuum region of the at least one holdingarrangement 100 for releasing the substrate 10 from the at least oneholding arrangement 100. The second negative pressure p2 can generate asecond suction force F2 for pulling the substrate 10 in the direction ofthe at least one holding arrangement 100. According to embodimentsdescribed herein, the second suction force F2 can be larger than thefirst suction force F1.

According to some embodiments described herein, the substrate 10 can bemoved towards the at least one holding arrangement 100 by appliance ofthe second negative pressure p2. Specifically, the second negativepressure p2 can be applied to increase the force with which thesubstrate 10 is pressed onto the dry adhesive material 120. As outlinedherein, the adhesive force applied by the dry adhesive material 120 tothe substrate 10 can be altered, specifically lowered, by moving thesubstrate 10 closer to the holding arrangement 100.

FIG. 10 shows a flow chart of a method 500 releasing a substrate 10 fromat least one holding arrangement 100. The method 500 can utilize holdingarrangements 100 and carriers 200 according to some embodimentsdescribed herein. Likewise, holding arrangements 100 and carriers 200can be configured to implement the method 500 according to theembodiments described herein.

The method 500 can include, in block 510, increasing the vacuum in avacuum region of the at least one holding arrangement 100 to increasethe force with which the substrate 10 is pressed onto a dry adhesivematerial 120. Specifically, by increasing the force with which thesubstrate 10 is pressed onto the dry adhesive material 120, thesubstrate can be released from the at least one holding arrangement 100.

According to embodiments described herein, the method for holding asubstrate and/or the method for releasing a substrate can be conductedby means of computer programs, software, computer software products andthe interrelated controllers, which can have a CPU, a memory, a userinterface, and input and output devices being in communication with thecorresponding components of an apparatus for processing a substrate,such as the deposition system described herein.

The present disclosure can use a suction force acting in the directionof a holding arrangement to release a substrate from the holdingarrangement having a dry adhesive material. In particular, a negativepressure can be applied to generate a suction force for pulling thesubstrate toward the holding arrangement. The dry adhesive material canbe detached from the substrate surface with reduced mechanical stress.When practicing some embodiments described herein, damage or breakage ofthe substrate can be prevented. Specifically, particle generation can bereduced. Furthermore, by using different vacuum levels and/or negativepressures for attaching and/or releasing a substrate, a high rate ornumber of cycles per time can be achieved when practicing someembodiments described herein. Furthermore, the adhesive can reduce oreven prevent a bulging when holding the substrate, e.g., a bulging dueto forces that can push the substrate edge towards the center of thesubstrate. In practice, some embodiments of the present disclosure canhold bigger and thinner substrates without damage or breakage.

While the foregoing is directed to embodiments of the disclosure, otherand further embodiments of the disclosure may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

The invention claimed is:
 1. An apparatus for processing a substrate,comprising: a body portion having a first side; a dry adhesive materialprovided on the first side of the body portion; a seal surrounding thedry adhesive material and configured to provide a vacuum region on thefirst side, wherein the dry adhesive material is provided in the vacuumregion; a conduit to evacuate the vacuum region; and a controllerconfigured to attach a substrate to the body portion under appliance ofa first negative pressure to the vacuum region to provide a firstsuction force to pull the substrate towards the dry adhesive materialand to release the substrate from the body portion under application ofa second negative pressure to the vacuum region to increase a force withwhich the substrate is pressed onto the dry adhesive material, whereinthe second negative pressure provides a second suction force to pull thesubstrate towards the dry adhesive material, wherein the second negativepressure is smaller than the first negative pressure so that the secondsuction force is larger than the first suction force, such that thecontroller is configured to cause the substrate to release from the bodyportion by moving the substrate towards the body portion.
 2. Theapparatus for processing a substrate according to claim 1, wherein thefirst negative pressure is smaller than about 1 bar and/or wherein thesecond negative pressure is larger than 0 bar.
 3. The apparatus forprocessing a substrate according to claim 1, wherein the dry adhesivematerial is a synthetic setae material and/or a Gecko adhesive.
 4. Theapparatus for processing a substrate according to claim 1, wherein theconduit is configured to be connected to a suction port for applying anegative pressure to the vacuum region.
 5. An apparatus for processing asubstrate during substrate processing in a vacuum processing chamber,comprising: a body portion having a first side; a dry adhesive materialprovided on the first side of the body portion and comprising aplurality of filaments; a seal surrounding the dry adhesive material andconfigured to provide a vacuum region on the first side, wherein the dryadhesive material is provided in the vacuum region; a conduit toevacuate the vacuum region; and a controller configured to cause theconduit to apply a first negative pressure to the vacuum region toattach the substrate, and to apply a second negative pressure to thevacuum region to move the substrate closer to the body portion to bucklethe plurality of filaments, releasing the substrate, wherein the secondnegative pressure is smaller than the first negative pressure so that asecond suction force provided by the second negative pressure to pullthe substrate towards the dry adhesive material is larger than a firstsuction force provided by the first negative pressure to pull thesubstrate towards the dry adhesive material, such that the controller isconfigured to cause the substrate to release from the body portion bymoving the substrate towards the body portion.